Introduction to Microsystem Technology
A Guide for Students
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Beschreibung
Over half a century after the discovery of the piezoresistiveeffect, microsystem technology has experienced considerabledevelopments. Expanding the opportunities of microelectronics tonon-electronic systems, its number of application fields continuesto increase. Microsensors are one of the most important fields,used in medical applications and micromechanics. Microfluidicsystems are also a significant area, most commonly used in ink-jetprinter heads.
This textbook focuses on the essentials of microsystemstechnology, providing a knowledgeable grounding and a clear paththrough this well-established scientific dicipline. With amethodical, student-orientated approach, Introduction toMicrosystem Technology covers the following:
* microsystem materials (including silicon, polymers and thinfilms), and the scaling effects of going micro;
* fabrication techniques based on different material properties,descriptions of their limitations and functional and shape elementsproduced by these techniques;
* sensors and actuators based on elements such as mechanical,fluidic, and thermal (yaw rate sensor components aredescribed);
* the influence of technology parameters on microsystemproperties, asking, for example, when is the function of amicrosystem device robust and safe?
The book presents problems at the end of each chapter so thatyou may test your understanding of the key concepts (full solutionsfor these are given on an accompanying website). Practical examplesare included also, as well as case studies that enable a betterunderstanding of the technology as a whole. With its extensivetreatment on the fundamentals of microsystem technology, this bookalso serves as a compendium for engineers and technicians workingwith microsystem technology.
Autor*in
Gerald Gerlach
Themen in »Introduction to Microsystem Technology«
Circuit Theory & Design / VLSI / ULSI Components & Devices Electrical & Electronics Engineering Elektrotechnik u. Elektronik Komponenten u. Bauelemente MEMS Schaltkreise - Theorie u. Entwurf / VLSI / ULSI