EUV Lithography

Beschreibung

EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.

Autor*in

Vivek Bakshi

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Electrical & Electronics Engineering Electrical Engineering Special Topics Elektrotechnik Elektrotechnik u. Elektronik Halbleiter Halbleitertechnik Semiconductors Spezialthemen Elektrotechnik

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