Smart Material Systems and MEMS

Beschreibung

Presenting unified coverage of the design and modeling of smartmicro- and macrosystems, this book addresses fabrication issues andoutlines the challenges faced by engineers working with smartsensors in a variety of applications. Part I deals with the fundamental concepts of a typical smartsystem and its constituent components. Preliminary fabrication andcharacterization concepts are introduced before design principlesare discussed in detail. Part III presents a comprehensive accountof the modeling of smart systems, smart sensors and actuators. PartIV builds upon the fundamental concepts to analyze fabricationtechniques for silicon-based MEMS in more detail. Practicing engineers will benefit from the detailed assessmentof applications in communications technology, aerospace, biomedicaland mechanical engineering. The book provides an essentialreference or textbook for graduates following a course in smartsensors, actuators and systems.

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Vijay K. Varadan

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Elektrotechnik Mikrosystemtechnik Nanotechnologie Nanotechnology

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