Dielectric Films for Advanced Microelectronics
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Beschreibung
The topic of thin films is an area of increasing importance inmaterials science, electrical engineering and applied solid statephysics; with both research and industrial applications inmicroelectronics, computer manufacturing, and physical devices.Advanced, high-performance computers, high-definition TV, broadbandimaging systems, flat-panel displays, robotic systems, and medicalelectronics and diagnostics are a few examples of the miniaturizeddevice technologies that depend on the utilization of thin filmmaterials.
This book presents an in-depth overview of the noveldevelopments made by the scientific leaders in the area of moderndielectric films for advanced microelectronic applications.It contains clear, concise explanations of material science ofdielectric films and their problem for device operation, includinghigh-k, low-k, medium-k dielectric films and also specific featuresand requirements for dielectric films used in the packagingtechnology. A broad range of related topics are covered, fromphysical principles to design, fabrication, characterization, andapplications of novel dielectric films.
Autor*in
Mikhail Baklanov
Themen in »Dielectric Films for Advanced Microelectronics«
Dielectrics & Electric Insulators Dielektrika u. Isolatoren Dielektrizität Dünne Schichten, Oberflächen u. Grenzflächen Electrical & Electronics Engineering Elektrotechnik u. Elektronik Materials Science Materialwissenschaften Mikroelektronik Thin Films, Surfaces & Interfaces
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"The book is well organized and has excellent technical depth with recent state-of-the-art information. Researchers, graduate students, and those in industry working on finding new materials and processes for thin-film dielectric materials would find this book to be a valuable resource." (IEEE Electrical Insulation Magazine, March/April 2009)
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